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Items where Person is "Ennahali, Mohamed"

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Testa, Fabrice and Coetsier, Clémence and Carretier, Emilie and Ennahali, Mohamed and Laborie, Bernard and Moulin, Philippe. Recycling a slurry for reuse in chemical mechanical planarization of tungsten wafer: Effect of chemical adjustments and comparison between static and dynamic experiments. (2014) Microelectronic Engineering, 113. 114-122. ISSN 0167-9317

This list was generated on Sat Nov 16 05:47:34 2019 CET.