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Items where Person is "Ennahali, Mohamed"
Group by: Item Type | No Grouping Jump to: Article Number of items: 1. ArticleTesta, Fabrice and Coetsier, Clémence and Carretier, Emilie and Ennahali, Mohamed and Laborie, Bernard and Moulin, Philippe. Recycling a slurry for reuse in chemical mechanical planarization of tungsten wafer: Effect of chemical adjustments and comparison between static and dynamic experiments. (2014) Microelectronic Engineering, 113. 114-122. ISSN 0167-9317 |
