Number of items at this level: 1.
Testa, Fabrice and Coetsier, Clémence
and Carretier, Emilie and Ennahali, Mohamed and Laborie, Bernard and Moulin, Philippe
Recycling a slurry for reuse in chemical mechanical planarization of tungsten wafer: Effect of chemical adjustments and comparison between static and dynamic experiments.
(2014)
Microelectronic Engineering, 113. 114-122. ISSN 0167-9317
This list was generated on Sat Sep 18 10:35:01 2021 CEST.
