OATAO - Open Archive Toulouse Archive Ouverte Open Access Week

Items where Institution is :Other partners > KEMESYS - Laboratoire (FRANCE)

Up a level
Export as [feed] Atom [feed] RSS 1.0 [feed] RSS 2.0
Number of items at this level: 1.

Testa, Fabrice and Coetsier, Clémence and Carretier, Emilie and Ennahali, Mohamed and Laborie, Bernard and Moulin, Philippe Recycling a slurry for reuse in chemical mechanical planarization of tungsten wafer: Effect of chemical adjustments and comparison between static and dynamic experiments. (2014) Microelectronic Engineering, 113. 114-122. ISSN 0167-9317

This list was generated on Tue Mar 19 20:35:50 2019 CET.