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Mechanical characterization of individual polycrystalline carbon tubes for use in electrical nano-interconnects

Khiat, Ali and Poelma, Rene H. and Zhang, Guoqi and Heuck, Friedjof and Tichelaar, Frans D. and Sarno, Maria and Ciambelli, Paolo and Fontorbes, Sandra and Arurault, Laurent and Staufer, Urs Mechanical characterization of individual polycrystalline carbon tubes for use in electrical nano-interconnects. (2012) Microelectronic Engineering, 98. 317-320. ISSN 0167-9317

(Document in English)

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Official URL: http://dx.doi.org/10.1016/j.mee.2012.07.087


Polycrystalline carbon tubes were generated by CVD inside electrochemically prepared nano-porous anodic aluminium oxide membranes. This method produced nano-tubes without catalyst, featuring polycrystalline and a few layer thick walls. Individual tubes could be isolated and suspended on microfabricated substrates such that they formed single-side clamped beams. These beams were then used to investigate their mechanical properties employing electrostatic forces for bending the tubes beyond their mechanical stability where pull-in occurs, which could be detected by monitoring the current flowing from the tube to the substrate.

Item Type:Article
Additional Information:Thanks to Elsevier editor. The definitive version is available at : http://dx.doi.org/10.1016/j.mee.2012.07.087
HAL Id:hal-03528829
Audience (journal):International peer-reviewed journal
Uncontrolled Keywords:
Institution:French research institutions > Centre National de la Recherche Scientifique - CNRS (FRANCE)
Université de Toulouse > Institut National Polytechnique de Toulouse - Toulouse INP (FRANCE)
Université de Toulouse > Université Toulouse III - Paul Sabatier - UT3 (FRANCE)
Other partners > Delft University of Technology - TU Delft (NETHERLANDS)
Other partners > Philips (NETHERLANDS)
Other partners > Università degli Studi di Salerno - UniSa (ITALY)
Laboratory name:
Deposited On:23 Oct 2013 09:31

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