Khiat, Ali and Poelma, Rene H. and Zhang, Guoqi and Heuck, Friedjof and Tichelaar, Frans D. and Sarno, Maria and Ciambelli, Paolo and Fontorbes, Sandra and Arurault, Laurent
and Staufer, Urs
Mechanical characterization of individual polycrystalline carbon tubes for use in electrical nano-interconnects.
(2012)
Microelectronic Engineering, 98. 317-320. ISSN 0167-9317
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(Document in English)
PDF (Author's version) - Requires a PDF viewer such as GSview, Xpdf or Adobe Acrobat Reader 444kB |
Official URL: http://dx.doi.org/10.1016/j.mee.2012.07.087
Abstract
Polycrystalline carbon tubes were generated by CVD inside electrochemically prepared nano-porous anodic aluminium oxide membranes. This method produced nano-tubes without catalyst, featuring polycrystalline and a few layer thick walls. Individual tubes could be isolated and suspended on microfabricated substrates such that they formed single-side clamped beams. These beams were then used to investigate their mechanical properties employing electrostatic forces for bending the tubes beyond their mechanical stability where pull-in occurs, which could be detected by monitoring the current flowing from the tube to the substrate.
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