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SPS-prepared targets for sputtering deposition of phase change films.

Essi, Marc Marie-Maurice Meledge and Yot, Pascal and Chevallier, Geoffroy and Estournès, Claude and Pradel, Annie SPS-prepared targets for sputtering deposition of phase change films. (2011) Digest Journal of Nanomaterials and Biostructures, 6 (4). 1777-1782. ISSN 1842-3582

(Document in English)

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Official URL: http://www.chalcogen.ro/1777_Essi.pdf


Phase-change materials like thin films from the systems [Ge1-xPbx]Te and Ge[Te1-xSex] are of interest for data storage. For these compositions amorphous materials can not be obtained by melt quenching. However, Suitable films can be obtained using RF sputtering. Spark plasma sintering (SPS) was used to densify the powders to obtain large targets. Synthesis conditions and characterisations of the targets are reported. Amorphous nano films were obtained using the sintered targets and characterised.

Item Type:Article
Additional Information:Thanks to Forum of chalcogeniders editor. The definitive version is available at http://www.chalcogen.infim.ro/index.html The original PDF of the article can be found at Digest Journal of Nanomaterials and Biostructures website: http://www.chalcogen.infim.ro/digest.html
HAL Id:hal-03541269
Audience (journal):International peer-reviewed journal
Uncontrolled Keywords:
Institution:French research institutions > Centre National de la Recherche Scientifique - CNRS (FRANCE)
Other partners > Ecole Nationale Supérieure de Chimie de Montpellier - ENSCM (FRANCE)
Université de Toulouse > Institut National Polytechnique de Toulouse - Toulouse INP (FRANCE)
Université de Toulouse > Université Toulouse III - Paul Sabatier - UT3 (FRANCE)
Other partners > Université de Cocody-Abidjan (IVORY COAST)
Other partners > Université de Montpellier 1 (FRANCE)
Other partners > Université de Montpellier 2 (FRANCE)
Laboratory name:
Deposited On:07 Dec 2012 13:27

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