SPS-prepared targets for sputtering deposition of phase change films.

Abstract

Phase-change materials like thin films from the systems [Ge1-xPbx]Te and Ge[Te1-xSex] are of interest for data storage. For these compositions amorphous materials can not be obtained by melt quenching. However, Suitable films can be obtained using RF sputtering. Spark plasma sintering (SPS) was used to densify the powders to obtain large targets. Synthesis conditions and characterisations of the targets are reported. Amorphous nano films were obtained using the sintered targets and characterised.