Vergnes, Hugues
and Samélor, Diane and Gleizes, Alain and Vahlas, Constantin and Caussat, Brigitte
Local Kinetic Modeling of Aluminum Oxide Metal-Organic CVD From Aluminum Tri-isopropoxide.
(2011)
Chemical Vapor Deposition, 17 (7-9). 181-185. ISSN 0948-1907
![[img]](https://oatao.univ-toulouse.fr/style/images/fileicons/application_pdf.png) |
(Document in English)
PDF (Publisher's version) - Depositor and staff only - Requires a PDF viewer such as GSview, Xpdf or Adobe Acrobat Reader 248kB |
Official URL: http://dx.doi.org/10.1002/cvde.201004301
Abstract
Due to numerous allotropic modifications and to the subsequent large spectrum of structure-properties relationships,aluminum oxides in the form of films and coatings are of major technological interest for a wide range of applications, e.g., optics and microelectronic components,wear resistance, catalyst support, protection against corrosion,and high temperature oxidation. Metal-organic(MO)CVD is a potentially attractive technique for the processing of such coatings, especially on complex-in-shape, temperature-sensitive parts.
| Item Type: | Article |
|---|---|
| Additional Information: | Thanks to John Wiley & Sons editor. The definitive version is available at http://onlinelibrary.wiley.com/doi/10.1002/cvde.201004301/abstract |
| Audience (journal): | International peer-reviewed journal |
| Uncontrolled Keywords: | |
| Institution: | French research institutions > Centre National de la Recherche Scientifique - CNRS (FRANCE) Université de Toulouse > Institut National Polytechnique de Toulouse - Toulouse INP (FRANCE) Université de Toulouse > Université Toulouse III - Paul Sabatier - UT3 (FRANCE) |
| Laboratory name: | Laboratoire de Génie Chimique - LGC (Toulouse, France) - Génie des Interfaces & Milieux Divisés (GIMD) - CVD Centre Interuniversitaire de Recherche et d'Ingénierie des Matériaux - CIRIMAT (Toulouse, France) |
| Funders: | BQR INPT |
| Statistics: | download |
| Deposited On: | 04 Nov 2011 15:35 |
Repository Staff Only: item control page
