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Multiobjective scheduling for semiconductor manufacturing plants

Baez Senties, Oscar and Azzaro-Pantel, Catherine and Pibouleau, Luc and Domenech, Serge Multiobjective scheduling for semiconductor manufacturing plants. (2010) Computers & Chemical Engineering, 34 (4). 555-566. ISSN 0098-1354

(Document in English)

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Official URL: http://dx.doi.org/10.1016/j.compchemeng.2010.01.010


Scheduling of semiconductor wafer manufacturing system is identified as a complex problem, involving multiple and conflicting objectives (minimization of facility average utilization, minimization of waiting time and storage, for instance) to simultaneously satisfy. In this study, we propose an efficient approach based on an artificial neural network technique embedded into a multiobjective genetic algorithm for multi-decision scheduling problems in a semiconductor wafer fabrication environment.

Item Type:Article
Additional Information:Thanks to Elsevier editor. The definitive version is available at http://www.sciencedirect.com The original PDF of the article can be found at Computers & Chemical Engineering website : http://www.sciencedirect.com/science/journal/00981354
HAL Id:hal-03549594
Audience (journal):International peer-reviewed journal
Uncontrolled Keywords:
Institution:French research institutions > Centre National de la Recherche Scientifique - CNRS (FRANCE)
Université de Toulouse > Institut National Polytechnique de Toulouse - Toulouse INP (FRANCE)
Université de Toulouse > Université Toulouse III - Paul Sabatier - UT3 (FRANCE)
Laboratory name:
Laboratoire de Génie Chimique - LGC (Toulouse, France) - Procédés Systèmes Industriels (PSI) - Conception Optimisation Ordonnancement des Procédés (COOP)
Deposited On:04 Oct 2011 09:49

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