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Microscale friction reduction by normal force modulation in MEMS.

Van Spengen, W. Merlijn and Wijts, Geert and Turq, Viviane and Frenken, Joost W. M. Microscale friction reduction by normal force modulation in MEMS. (2010) Journal of Adhesion Science and Technology, 24 (15-16). 2669-2680. ISSN 0169-4243

(Document in English)

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Official URL: http://dx.doi.org/10.1163/016942410X508226


Friction in MEMS-scale devices is troublesome because it can result in lateral stiction of two sliding surfaces. We have investigated the effect of modulation of the normal force on the friction between two sliding MEMS surfaces, using a fully MEMS-based tribometer. We have found that the friction is reduced significantly when the modulation is large enough. A simple model is presented that describes the friction reduction as a function of modulation frequency as well. Using this technique, lateral stiction-related seizure of microscopic sliding components can be mitigated.

Item Type:Article
Additional Information:Thanks to Brill editor. The definitive version is available at http://www.brill.nl/ The original PDF of the article can be found at Journal of Adhesion Science and Technology website : http://www.ingentaconnect.com/content/vsp/ast/2010/00000024/F0020015/art00020
HAL Id:hal-03550503
Audience (journal):International peer-reviewed journal
Uncontrolled Keywords:
Institution:French research institutions > Centre National de la Recherche Scientifique - CNRS (FRANCE)
Université de Toulouse > Institut National Polytechnique de Toulouse - Toulouse INP (FRANCE)
Université de Toulouse > Université Toulouse III - Paul Sabatier - UT3 (FRANCE)
Other partners > Delft University of Technology - TU Delft (NETHERLANDS)
Other partners > Universiteit Leiden (NETHERLANDS)
Laboratory name:
Deposited On:01 Jun 2011 12:36

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