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Electrical conductivity of parylene F at high temperature

Diaham, Sombel and Bechara Keyrouz, Mireille and Locatelli, Marie-Laure and Tenailleau, Christophe Electrical conductivity of parylene F at high temperature. (2011) Journal of Electronic Materials, 40 (3). 295-300. ISSN 0361-5235

(Document in English)

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Official URL: http://dx.doi.org/10.1007/s11664-010-1414-y


The electrical conductivity of both as-deposited and annealed poly(α,α,α′,α′-tetrafluoro-p-xylylene) (PA-F) films has been investigated up to 400°C. The static conductivity (σ DC) values of PA-F measured between 200°C and 340°C appear to be ∼2.5 orders of magnitude lower for annealed films than for as-deposited ones. This change is attributed to a strong increase in the crystallinity of the material occurring above 340°C. After annealing at 400°C in N2, the σ DC value measured at 300°C, for instance, decreased from 3.8 × 10−12 Ω−1 cm−1 to 7.5 × 10−15 Ω−1 cm−1. Physical interpretations of such an improvement are offered.

Item Type:Article
Additional Information:Thanks to Springer editor. The definitive version is available at http://www.springerlink.com/. The original PDF of the article can be found at Journal of Electronic Materials website : http://www.springerlink.com/content/q61007x870311x24/references/
HAL Id:hal-03544180
Audience (journal):International peer-reviewed journal
Uncontrolled Keywords:
Institution:French research institutions > Centre National de la Recherche Scientifique - CNRS (FRANCE)
Université de Toulouse > Institut National Polytechnique de Toulouse - Toulouse INP (FRANCE)
Université de Toulouse > Université Toulouse III - Paul Sabatier - UT3 (FRANCE)
Laboratory name:
Deposited On:29 Apr 2011 10:46

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