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Mass spectrometry as a tool study CVD process

Turgambaeva, Asiya E. and Krisyuk, Vladislav V. and Prud’homme, Nathalie and Vahlas, Constantin Mass spectrometry as a tool study CVD process. (2009) ECS Meeting Abstracts, 25 (8). 1301-1308. ISSN 1091-8213

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Official URL: http://dx.doi.org/10.1149/1.3207736


Mass spectrometry as a tool study CVD process. Application of two mass spectrometric (MS) techniques to study chemical vapour deposition from organometallic precursors is described. CpCuPEt3 (Cp = η5-C5H5, Et =C2H5) was used as a model precursor in this work.

Item Type:Article
Additional Information:This article is available on procedings about : 216th ECS Meeting, October 4 - October 9, 2009 , Vienna, Austria. Thanks to The Electrochemical Society editor. The definitive version is available at www.electrochem.org/ The original PDF of the article can be found at ECS Meeting Abstracts website : http://scitation.aip.org/getabs/servlet/GetabsServlet?prog=normal&id=ECSTF8000025000008001301000001&idtype=cvips&gifs=yes&ref=no
HAL Id:hal-03565683
Audience (journal):International peer-reviewed journal
Uncontrolled Keywords:
Institution:French research institutions > Centre National de la Recherche Scientifique - CNRS (FRANCE)
Université de Toulouse > Institut National Polytechnique de Toulouse - Toulouse INP (FRANCE)
Other partners > Siberian Branch of the Russian Academy of Sciences - SB RAS (RUSSIA)
Université de Toulouse > Université Toulouse III - Paul Sabatier - UT3 (FRANCE)
Laboratory name:
Deposited On:19 Jan 2011 15:49

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