Turgambaeva, Asiya E. and Krisyuk, Vladislav V. and Prud’homme, Nathalie and Vahlas, Constantin Mass spectrometry as a tool study CVD process. (2009) ECS Meeting Abstracts, 25 (8). 1301-1308. ISSN 1091-8213
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(Document in English)
PDF ( Author's version) - Requires a PDF viewer such as GSview, Xpdf or Adobe Acrobat Reader 141kB |
Official URL: http://dx.doi.org/10.1149/1.3207736
Abstract
Mass spectrometry as a tool study CVD process. Application of two mass spectrometric (MS) techniques to study chemical vapour deposition from organometallic precursors is described. CpCuPEt3 (Cp = η5-C5H5, Et =C2H5) was used as a model precursor in this work.
| Item Type: | Article |
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| Additional Information: | This article is available on procedings about : 216th ECS Meeting, October 4 - October 9, 2009 , Vienna, Austria. Thanks to The Electrochemical Society editor. The definitive version is available at www.electrochem.org/ The original PDF of the article can be found at ECS Meeting Abstracts website : http://scitation.aip.org/getabs/servlet/GetabsServlet?prog=normal&id=ECSTF8000025000008001301000001&idtype=cvips&gifs=yes&ref=no |
| Audience (journal): | International peer-reviewed journal |
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| Institution: | French research institutions > Centre National de la Recherche Scientifique - CNRS (FRANCE) Université de Toulouse > Institut National Polytechnique de Toulouse - Toulouse INP (FRANCE) Other partners > Siberian Branch of the Russian Academy of Sciences - SB RAS (RUSSIA) Université de Toulouse > Université Toulouse III - Paul Sabatier - UT3 (FRANCE) |
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| Statistics: | download |
| Deposited On: | 19 Jan 2011 15:49 |
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