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Time reversal plasmas as a versatile space-time patterning deposition method

Mazières, Valentin and Pascaud, Romain and Liard, Laurent and Dap, Simon and Clergereaux, Richard and Pascal, Olivier Time reversal plasmas as a versatile space-time patterning deposition method. (2021) In: 2021 IEEE 16th Nanotechnology Materials and Devices Conference (NMDC), 12 December 2021 - 15 December 2021 (Vancouver, Canada).

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Official URL: https://doi.org/10.1109/NMDC50713.2021.9677515

Abstract

The aim of this communication is to discuss the possibility of using the innovative plasma source that we have developed recently, namely the “Space-Time Plasma Steering Source”, as a versatile space-time deposition method. More precisely, we focus on the space-time control capabilities of time reversal plasmas over large and complex 3D surfaces. Simultaneous ignition of several plasmas by time reversal is also experimentally demonstrated. These unprecedented control capabilities of plasmas could lead to the development of an original and versatile method allowing the patterning of complex 2D or 3D structures on large areas.

Item Type:Conference or Workshop Item (Paper)
Additional Information:Thanks to the IEEE (Institute of Electrical and Electronics Engineers). This paper is available at : https://ieeexplore.ieee.org/document/9677515 “© 2021 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.
HAL Id:hal-03765762
Audience (conference):International conference proceedings
Uncontrolled Keywords:
Institution:French research institutions > Centre National de la Recherche Scientifique - CNRS (FRANCE)
Université de Toulouse > Institut National Polytechnique de Toulouse - Toulouse INP (FRANCE)
Université de Toulouse > Institut Supérieur de l'Aéronautique et de l'Espace - ISAE-SUPAERO (FRANCE)
Université de Toulouse > Université Toulouse III - Paul Sabatier - UT3 (FRANCE)
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Funders:
DGA - AID
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Deposited On:31 Aug 2022 12:33

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