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In- and out-plane transport properties of chemical vapor deposited TiO2 anatase films

Miquelot, Adeline and Youssef, Laurène and Villeneuve-Faure, Christina and Prud’homme, Nathalie and Dragoe, Nita and Nada, A and Rouessac, Vincent and Roualdes, Stéphanie and Bassil, J and Zakhour, Mirvat and Nakhl, M and Vahlas, Constantin In- and out-plane transport properties of chemical vapor deposited TiO2 anatase films. (2021) Journal of Materials Science, 56 (17). 10458-10476. ISSN 0022-2461

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Official URL: https://doi.org/10.1007/s10853-021-05955-6

Abstract

Due to their polymorphism, TiO2 films are quintessential components of state-of-the-art functional materials and devices for various applications from dynamic random access memory to solar water splitting. However, contrary to other semiconductors/dielectric materials, the relationship between structural/morphological and electrical properties at the nano and microscales remains unclear. In this context, the morphological characteristics of TiO2 films obtained by metal–organic chemical vapor deposition (MOCVD) and plasma-enhanced chemical vapor deposition (PECVD), the latter including nitrogen doping, are investigated and they are linked to their in- and out-plane electrical properties. A transition from dense to tree-like columnar morphology is observed for the MOCVD films with increasing deposition temperature. It results in the decrease in grain size and the increase in porosity and disorder, and subsequently, it leads to the decrease in lateral carrier mobility. The increase in nitrogen amount in the PECVD films enhances the disorder in their pillar-like columnar morphology along with a slight increase in density. A similar behavior is observed for the out-plane current between the low temperature MOCVD films and the undoped PECVD ones. The pillar-like structure of the latter presents a lower in-plane resistivity than the low temperature MOCVD films, whereas the out-plane resistivity is lower. The tree-like columnar structure exhibits poor in- and out-plane conductivity properties, whereas pillar-like and dense TiO2 exhibits similar in- and out-plane conductivities even if their morphologies are noticeably different.

Item Type:Article
Audience (journal):International peer-reviewed journal
Uncontrolled Keywords:
Institution:French research institutions > Centre National de la Recherche Scientifique - CNRS (FRANCE)
Other partners > Egyptian Petroleum Research Institute - EPRI (EGYPT)
Other partners > Ecole Nationale Supérieure de Chimie de Montpellier - ENSCM (FRANCE)
Université de Toulouse > Institut National Polytechnique de Toulouse - Toulouse INP (FRANCE)
Other partners > Lebanese University - LU (LEBANON)
Other partners > Université Paris-Saclay (FRANCE)
Université de Toulouse > Université Toulouse III - Paul Sabatier - UT3 (FRANCE)
Other partners > Université de Montpellier (FRANCE)
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Deposited On:25 Feb 2022 09:26

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