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WO3 processed by direct laser interference patterning for NO2 detection

Parellada-Monreal, Laura and Gherardi, Sandro and Zonta, Giulia and Malagù, Cesare and Casotti, Davide and Cruciani, Giuseppe and Guidi, Vincenzo and Martínez-Calderón, Miguel and Castro-Hurtado, Irène and Gamarra, Daniel and Lozano, Jesus and Presmanes, Lionel and Mandayo, Gemma García WO3 processed by direct laser interference patterning for NO2 detection. (2020) Sensors and Actuators B: Chemical, 305. 127226. ISSN 0925-4005

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Official URL: https://doi.org/10.1016/j.snb.2019.127226


In this paper two kind of sensors based on WO3 sputtered by magnetron sputtering and annealed at 600 °C have been studied. The first kind was processed by two-dimensional direct laser interfering patterning (DLIP) and the second one without any additional treatment. Morphological and structural characterization have shown a hole structure in a periodic line-pattern for the DLIP-processed sensors and a flat surface for the only-annealed sensors, both with a tetragonal WO3 phase. TOF-SIMS analysis has revealed that the first WO3 layers are reduced for both samples, which could improve sensing performance. Promising response enhancement of DLIP-processed sensors has been observed for low concentrations of NO2 (from 0.5 ppm to 5 ppm) at 200 °C, lowering the limit of detection (LOD) to 10 ppb, half of the LOD of the only-annealed sensors (20 ppb). Cross sensitivity to CO and HCHO have been investigated and the sensing mechanisms discussed.

Item Type:Article
HAL Id:hal-03216944
Audience (journal):International peer-reviewed journal
Uncontrolled Keywords:
Institution:French research institutions > Centre National de la Recherche Scientifique - CNRS (FRANCE)
Other partners > Centro Tecnológico CEIT-IK4 (SPAIN)
Université de Toulouse > Institut National Polytechnique de Toulouse - Toulouse INP (FRANCE)
Other partners > SCENT (ITALY)
Université de Toulouse > Université Toulouse III - Paul Sabatier - UT3 (FRANCE)
Other partners > Universidad de Navarra (SPAIN)
Other partners > Universidad de Extremadura Uex (SPAIN)
Other partners > Istituto Nazionale di Fisica Nucleare - INFN (ITALY)
Other partners > Università degli Studi di Ferrara - UNIFE (ITALY)
Laboratory name:
Ministry of Economy and Competitiveness - MINECO - Basque Government
Deposited On:04 May 2021 12:38

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