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Platinum Protective Coatings Processed by Organometallic CVD

Vahlas, Constantin and Delmas, Mathieu Platinum Protective Coatings Processed by Organometallic CVD. (2008) Chemical Vapor Deposition, 14 (5-6). 103-106. ISSN 0948-1907

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Official URL: http://dx.doi.org/10.1002/cvde.200704258


Platinum deposition by OMCVD from (Me3(MeCp)Pt) for protective coatings applications has been studied. Films grown at 473 K and 573 K on a Ti6242 alloy show a continuous microstructure, with growth rate of 19 nm · min−1 and 2.5 nm · min−1, respectively. No preferential orientation is observed at the latter temperature, while at 473 K films are textured following (111) orientation. The plot of thicknesses versus time at 473 K reveals an induction period followed by an autocatalytic growth. Platinum acts as a catalyst for the precursor decomposition when clusters reach critical size. At 573 K desorption of precursor from the surface prevents autocatalytic behaviour to appear resulting in decrease of the growth rate.

Item Type:Article
Additional Information:Thanks to John Wiley & Sons editor. The definitive version is available at http://www3.interscience.wiley.com The original PDF of the article can be found at Chemical Vapor Deposition website : http://www3.interscience.wiley.com/journal/10003226/home
HAL Id:hal-04501433
Audience (journal):International peer-reviewed journal
Uncontrolled Keywords:
Institution:Université de Toulouse > Institut National Polytechnique de Toulouse - Toulouse INP (FRANCE)
Université de Toulouse > Université Toulouse III - Paul Sabatier - UT3 (FRANCE)
French research institutions > Centre National de la Recherche Scientifique - CNRS (FRANCE)
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Deposited On:02 Jun 2009 13:19

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