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High performance thin film bulk acoustic resonator covered with carbon nanotubes

Dragoman, Mircea and Muller, Alexandru and Neculoiu, Dan and Vasilache, Dan-Adrian and Konstantinidis, George and Grenier, Katia and Dubuc, David and Bary, Laurent and Plana, Robert and Flahaut, Emmanuel High performance thin film bulk acoustic resonator covered with carbon nanotubes. (2006) Applied Physics Letters, 89. 143122-1. ISSN 0003-6951

(Document in English)

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Official URL: http://dx.doi.org/10.1063/1.2358838


This letter presents experimental results concerning a thin film bulk acoustic wave resonator realized on a thin GaN membrane and covered with a thin film of double walled carbon nanotube mixture. The quality factor was measured before and after the coating of the resonator with the nanotube thin film. The quality factor has increased more than ten times when the resonator was coated with nanotubes, due to their high elasticity modulus and low density, which confers a much higher acoustic impedance of the resonator electrodes and thus confines much better the longitudinal acoustic standing waves inside the resonator.

Item Type:Article
Additional Information:Thanks to American Institute of Physics editor. The definitive version is available at http://scitation.aip.org The original PDF of the article can be found at Applied Physics Letters website :http://apl.aip.org/apl/top.jsp
HAL Id:hal-03597103
Audience (journal):International peer-reviewed journal
Uncontrolled Keywords:
Institution:Other partners > Foundation for Research and Techonology Hellas – FORTH (GREECE)
Université de Toulouse > Institut National Polytechnique de Toulouse - Toulouse INP (FRANCE)
Université de Toulouse > Université Toulouse III - Paul Sabatier - UT3 (FRANCE)
Université de Toulouse > Institut National des Sciences Appliquées de Toulouse - INSA (FRANCE)
Other partners > National Research and Development Institute in Microtechnology - IMT (ROMANIA)
French research institutions > Centre National de la Recherche Scientifique - CNRS (FRANCE)
Laboratory name:
Deposited On:18 Jun 2009 07:03

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