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Iron Thin Films from Fe„CO…5 and FeCp2/H2O under Atmospheric Pressure

Senocq, François and Duminica, Florin-Daniel and Maury, Francis and Delsol, Thomas and Vahlas, Constantin Iron Thin Films from Fe„CO…5 and FeCp2/H2O under Atmospheric Pressure. (2006) Journal of The Electrochemical Society (JES), 153 (12). G1025-G1031. ISSN 0013-4651

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Official URL: http://dx.doi.org/10.1149/1.2352050


Iron layers were first obtained from iron pentacarbonyl in metallorganic chemical vapor deposition MOCVD process under atmospheric pressure, in the temperature range 473–773 K, in a vertical cold wall reactor. Films of good purity were obtained with or without hydrogen as co-reactant, no chemical additives being used. The experiments showed that the velocity of the gas stream and, to a lower extent, the precursor molar fraction are the key parameters to be controlled, in order to monitor film growth rate and purity. In a second step, Fe thin layers were obtained by atmospheric pressure MOCVD starting from the reactive gas mixture FeCp2 and H2O in the temperature range 973–1073 K. A thermochemical simulation of the Fe-C-H-O system allowed optimum processing conditions to be approached. X-ray diffraction and microprobe analysis showed that the highest iron content in the layer was obtained for H2O/FeCp2 ratios between 4 and 6. Film growth occurs in two steps: the initial formation of a black, powdered, and porous layer that becomes densified as a result of the grain growth on increasing the deposition time in order to form compact gray metal films. This two-step mechanism was confirmed by kinetic and in situ IR pyrometric observations.

Item Type:Article
Additional Information:Thanks to Electrochemical Society editor. The definitive version is available at http://scitation.aip.org The original PDF of the article can be found at Journal of The Electrochemical Society website : http://ecsdl.org/JES/
HAL Id:hal-03597524
Audience (journal):International peer-reviewed journal
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Institution:Université de Toulouse > Institut National Polytechnique de Toulouse - Toulouse INP (FRANCE)
Université de Toulouse > Université Toulouse III - Paul Sabatier - UT3 (FRANCE)
French research institutions > Centre National de la Recherche Scientifique - CNRS (FRANCE)
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Deposited On:19 May 2009 09:04

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