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Laser-induced periodic surface structures on ZnO thin film for high response NO2 detection

Parellada-Monreal, Laura and Castro-Hurtado, Irène and Martínez-Calderón, Miguel and Presmanes, Lionel and Mandayo, Gemma García Laser-induced periodic surface structures on ZnO thin film for high response NO2 detection. (2019) Applied Surface Science, 476. 569-575. ISSN 0169-4332

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Official URL: https://doi.org/10.1016/j.apsusc.2019.01.115


Femtosecond laser-induced periodic structures (LIPSS) have been processed on ZnO thin film gas sensor devices for nitrogen dioxide (NO2) detection. From the morphology point of view, the nanostructures have been identified as high spatial frequency LIPSS (HSFL) with an average period of 145 nm. Through Raman analysis, a decrease of the typical wurtzite ZnO structure is shown, with a possible increase of defects such as Zn interstitials. The response under NO2 is enhanced if compared with the only-annealed ZnO thin film for concentrations as low as 1 ppm, reaching 1 ppb of detection limit (LOD) for the sensors with LIPSS. The Zn interstitials defects could be the source of the adsorbed NO2 species increasing the sensitivity. Reproducible results have been measured during 11 weeks in a row.

Item Type:Article
HAL Id:hal-02359016
Audience (journal):International peer-reviewed journal
Uncontrolled Keywords:
Institution:French research institutions > Centre National de la Recherche Scientifique - CNRS (FRANCE)
Other partners > Centro Tecnológico CEIT-IK4 (SPAIN)
Université de Toulouse > Institut National Polytechnique de Toulouse - Toulouse INP (FRANCE)
Université de Toulouse > Université Toulouse III - Paul Sabatier - UT3 (FRANCE)
Other partners > Universidad de Navarra (SPAIN)
Laboratory name:
Ministry of Economy and Competitiveness (MINECO) - Basque Government
Deposited On:12 Nov 2019 10:42

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