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Diagnostic in CVD processes by IR pyrometry

Gasquères, Cyril and Duminica, Florin-Daniel and Maury, Francis Diagnostic in CVD processes by IR pyrometry. (2008) Chemical Engineering and Processing, 47 (3). 383-389. ISSN 0255-2701

(Document in English)

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Official URL: http://dx.doi.org/10.1016/j.cep.2007.01.005


The control of CVD processes requires in situ analysis techniques and real time monitoring to identify the chemical species involved in the mechanism, to determine the growth kinetics and more generally to detect and analyze the dynamics of any event occurring during the growth of the film. We demonstrate through four representative examples that IR pyrometry allows to answer to the last two items, which make it an attractive diagnostic tool for CVD processes, simple to use, sensitive at nanometric scale, economic and being able to operate either under atmospheric or low pressure. Thus, we monitored the initial stages of the growth of conducting diffusion barriers CrCxNy on Si and as a second example, we have followed their heat treatment to detect possible phase transformations. The case of MOCVD of Fe reveals the high sensitivity of this diagnostic technique. Indeed, the abrupt changes of the pyrometric signal correlate remarkably to changes in the growth mode. Lastly, the characteristic oscillations due to multireflexions at the interfaces observed in the first stages of the growth of transparent TiO2 film allow the real time determination of the growth rate. These examples show the great diagnostic potentialities of IR pyrometry for the optimization and the control of CVD processes.

Item Type:Article
Additional Information:Thanks to Elsevier editor. The definitive version is available at http://www.sciencedirect.com The original PDF of the article can be found at Chemical Engineering and Processing website : http://www.sciencedirect.com/science/journal/02552701
HAL Id:hal-00806114
Audience (journal):International peer-reviewed journal
Uncontrolled Keywords:
Institution:Université de Toulouse > Institut National Polytechnique de Toulouse - Toulouse INP (FRANCE)
Université de Toulouse > Université Toulouse III - Paul Sabatier - UT3 (FRANCE)
French research institutions > Centre National de la Recherche Scientifique - CNRS (FRANCE)
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Deposited On:06 May 2009 08:33

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