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New Stability Method of a Multirate Controller for a Three-Axis High-QMEMS Accelerometer With Simultaneous Electrostatic Damping

Ciotirca, Lavinia Elena and Bernal, Olivier and Enjalbert, Jérôme and Cassagnes, Thierry and Tap, Hélène and Beaulaton, Hugues and Sahin, Serdar New Stability Method of a Multirate Controller for a Three-Axis High-QMEMS Accelerometer With Simultaneous Electrostatic Damping. (2018) IEEE Sensors Journal, 18 (15). 6106-6114. ISSN 1530-437X

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Official URL: https://doi.org/10.1109/JSEN.2018.2844682


Over the past years, cutting-edge advances in electronics and microfabrication have allowed the integration of multiple sensors within integrated analog and digital circuits to design microelectromechanical systems. The multiple sensor integration or sensor fusion enables both cost and surface reduction, while maintaining high performances. This paper presents a new control system for an underdamped three-axis accelerometer, which allows the co-integration in the same cavity with a threeaxis Coriolis gyroscope to design a six degrees-of-freedom combo sensor. The accelerometer analog front end consumes 300 μA from a 1.6V power supply and is able to reach its steady state in 800 μs compared with a 400ms open loop and no damping configuration. The transducer control is implemented using a simultaneous multirate electrostatic damping method. To conclude on the closed-loop system stability, an innovative approach based on the multirate signal processing theory has been developed.

Item Type:Article
Additional Information:Thanks to IEEE editor. The definitive version is available at http://ieeexplore.ieee.org This papers appears in IEEE Sensors Journal. ISsN : 1530-437X The original PDF of the article can be found at: https://ieeexplore.ieee.org/document/8374059 Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.
HAL Id:hal-02092959
Audience (journal):International peer-reviewed journal
Uncontrolled Keywords:
Institution:French research institutions > Centre National de la Recherche Scientifique - CNRS (FRANCE)
Université de Toulouse > Institut National Polytechnique de Toulouse - Toulouse INP (FRANCE)
Other partners > NXP Semiconductors (FRANCE)
Université de Toulouse > Université Toulouse III - Paul Sabatier - UT3 (FRANCE)
Université de Toulouse > Université Toulouse - Jean Jaurès - UT2J (FRANCE)
Université de Toulouse > Université Toulouse 1 Capitole - UT1 (FRANCE)
Laboratory name:
Deposited On:01 Apr 2019 14:50

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