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A hybrid prognostics approach for MEMS: From real measurements to remaining useful life estimation

Skima, Haithem and Medjaher, Kamal and Varnier, Christophe and Dedu, Eugen and Bourgeois, Julien A hybrid prognostics approach for MEMS: From real measurements to remaining useful life estimation. (2016) Microelectronics Reliability, 65. 79-88. ISSN 0026-2714

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Official URL: https://dx.doi.org/10.1016/j.microrel.2016.07.142


This paper presents a hybrid prognostics approach for Micro Electro-Mechanical Systems (MEMS). This approach relies on two phases: an offline phase for the MEMS and its degradation modeling, and an online phase where the obtained degradation model is used with the available data for prognostics. In the online phase, the particle filter algorithm is used to perform online parameters estimation of the degradation model and predict the Remaining Useful Life (RUL) of MEMS. The effectiveness of the proposed approach is validated on experimental data related to an electro-thermally actuated MEMS valve

Item Type:Article
HAL Id:hal-02053280
Audience (journal):International peer-reviewed journal
Uncontrolled Keywords:
Institution:French research institutions > Centre National de la Recherche Scientifique - CNRS (FRANCE)
Other partners > Ecole Nationale Supérieure de Mécanique et des Microtechniques - ENSMM (FRANCE)
Université de Toulouse > Institut National Polytechnique de Toulouse - Toulouse INP (FRANCE)
Other partners > Université de Franche-Comté (FRANCE)
Other partners > Université de Technologie de Belfort-Montbéliard - UTBM (FRANCE)
Other partners > Université Bourgogne Franche-Comté - UBFC (FRANCE)
Laboratory name:
Deposited On:20 Feb 2019 15:29

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