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From EBIC Images to Qualitative Minority Carrier Diffusion Length Maps

Marcelot, Olivier and Magnan, Pierre From EBIC Images to Qualitative Minority Carrier Diffusion Length Maps. (2019) Ultramicroscopy, 197. 23-27. ISSN 0304-3991

(Document in English)

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Official URL: https://doi.org/10.1016/j.ultramic.2018.11.005


A novel method is presented with the aim to perform minority carrier diffusion length map on cross-sectional samples. The method is based on one Electron-Beam Induced Current (EBIC) acquisition and on the analyze of the EBIC signal slope variation on each scanned points. This method is applied on a pinned photodiode array realized on a low doped silicon epitaxy, and the electron diffusion length map which is extracted is in good accordance with our expectation taking into account the doping distribution of the device. A TCAD simulation also confirms quantitatively the measured diffusion length map. Advantages and drawbacks of this method are discussed in this study.

Item Type:Article
HAL Id:hal-01996559
Audience (journal):International peer-reviewed journal
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Institution:Université de Toulouse > Institut Supérieur de l'Aéronautique et de l'Espace - ISAE-SUPAERO (FRANCE)
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Deposited On:28 Jan 2019 13:45

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