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First steps towards design, simulation, modelling and fabrication of electrostatic micromotors

Lefèvre, Yvan and Lajoie-Mazenc, Michel and Sarraute, Emmanuel and Camon, Henri First steps towards design, simulation, modelling and fabrication of electrostatic micromotors. (1995) Sensors and Actuators A: Physical, 47 (1 - 3). 645-648. ISSN 0924-4247

(Document in English)

PDF (Author's version) - Requires a PDF viewer such as GSview, Xpdf or Adobe Acrobat Reader

Official URL: https://doi.org/10.1016/0924-4247(94)00979-R


Following the principles proposed by workers at Berkeley University, we have developed a version of the electrostatic micromotor based on the sacrificial layer method combined with oxidation of the rotor. In order to study the behaviour of this electrostatic micromotor, we have elaborated two softwares. The first, called EFCREL, is to simulate the static operation of the electrostatic micromotors and the second, called EFDYN, is to simulate their dynamic operation. Both are based on a finite-element code, called EFCAD, for electromagnetic field computation. They help us with the design of the fabricated micromotor and the simulation of its dynamic working, respectively. The elaboration of these two softwares represents our first steps towards a fully integrated CAD (computer aided design) system for micromotors.

Item Type:Article
Additional Information:Thanks to Elsevier editor. The original PDF of the article can be found at https://www.sciencedirect.com/science/article/pii/092442479400979R
HAL Id:hal-01792392
Audience (journal):International peer-reviewed journal
Uncontrolled Keywords:
Institution:French research institutions > Centre National de la Recherche Scientifique - CNRS (FRANCE)
Other partners > Ecole Normale Supérieure de Cachan - ENS Cachan (FRANCE)
Université de Toulouse > Institut National Polytechnique de Toulouse - Toulouse INP (FRANCE)
Other partners > Université de Cergy-Pontoise (FRANCE)
Laboratory name:
Deposited On:15 May 2018 11:57

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