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Integration of P-CuO thin sputtered layers onto microsensor platforms for gas sensing

Presmanes, Lionel and Thimont, Yohann and El Younsi, Imane and Chapelle, Audrey and Blanc, Frédéric and Talhi, Chabane and Bonningue, Corine and Barnabé, Antoine and Menini, Philippe and Tailhades, Philippe Integration of P-CuO thin sputtered layers onto microsensor platforms for gas sensing. (2017) Sensors, 17 (6). 1409/1-1409/17. ISSN 1424-8220

(Document in English)

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Official URL: http://dx.doi.org/10.3390/s17061409


P-type semiconducting copper oxide (CuO) thin films deposited by radio-frequency (RF) sputtering were integrated onto microsensors using classical photolithography technologies. The integration of the 50-nm-thick layer could be successfully carried out using the lift-off process. The microsensors were tested with variable thermal sequences under carbon monoxide (CO), ammonia (NH3), acetaldehyde (C2H4O), and nitrogen dioxide (NO2) which are among the main pollutant gases measured by metal-oxide (MOS) gas sensors for air quality control systems in automotive cabins. Because the microheaters were designed on a membrane, it was then possible to generate very rapid temperature variations (from room temperature to 550 °C in only 50 ms) and a rapid temperature cycling mode could be applied. This measurement mode allowed a significant improvement of the sensor response under 2 and 5 ppm of acetaldehyde.

Item Type:Article
Additional Information:Thanks to MDPI editor. The original PDF of the article can be found at http://www.mdpi.com/1424-8220/17/6/1409
HAL Id:hal-01754823
Audience (journal):International peer-reviewed journal
Uncontrolled Keywords:
Institution:French research institutions > Centre National de la Recherche Scientifique - CNRS (FRANCE)
Université de Toulouse > Institut National Polytechnique de Toulouse - Toulouse INP (FRANCE)
Université de Toulouse > Université Toulouse III - Paul Sabatier - UT3 (FRANCE)
Laboratory name:
Deposited On:30 Mar 2018 08:52

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