Presmanes, Lionel and Thimont, Yohann
and Chapelle, Audrey
and Blanc, Frédéric
and Talhi, Chabane
and Bonningue, Corine
and Barnabé, Antoine
and Menini, Philippe
and Tailhades, Philippe
Highly Sensitive Sputtered ZnO:Ga Thin Films Integrated by a Simple Stencil Mask Process on Microsensor Platforms for Sub-ppm Acetaldehyde Detection.
(2017)
Sensors, 17 (5). 1-12. ISSN 1424-8220
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(Document in English)
PDF (Publisher's version) - Requires a PDF viewer such as GSview, Xpdf or Adobe Acrobat Reader 4MB |
Official URL: https://dx.doi.org/10.3390/s17051055
Abstract
The integration of a 50-nm-thick layer of an innovative sensitive material on microsensors has been developed based on silicon micro-hotplates. In this study, integration of ZnO:Ga via radio-frequency (RF) sputtering has been successfully combined with a low cost and reliable stencil mask technique to obtain repeatable sensing layers on top of interdigitated electrodes. The variation of the resistance of this n-type Ga-doped ZnO has been measured under sub-ppm traces (500 ppb) of acetaldehyde (C2H4O). Thanks to the microheater designed into a thin membrane, the generation of very rapid temperature variations (from room temperature to 550° C in 25 ms) is possible, and a rapid cycled pulsed-temperature operating mode can be applied to the sensor. This approach reveals a strong improvement of sensing performances with a huge sensitivity between 10 and 1000, depending on the working pulsed-temperature level.
Item Type: | Article |
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Additional Information: | Thanks to Basel, Switzerland editor. The original PDF of the article can be found at Sensors website : http://www.mdpi.com/1424-8220/17/5/1055 |
HAL Id: | hal-01759300 |
Audience (journal): | International peer-reviewed journal |
Uncontrolled Keywords: | |
Institution: | French research institutions > Centre National de la Recherche Scientifique - CNRS (FRANCE) Université de Toulouse > Institut National Polytechnique de Toulouse - INPT (FRANCE) Université de Toulouse > Institut National des Sciences Appliquées de Toulouse - INSA (FRANCE) Université de Toulouse > Université Toulouse III - Paul Sabatier - UPS (FRANCE) |
Laboratory name: | |
Statistics: | download |
Deposited By: | cirimat webmestre |
Deposited On: | 05 Apr 2018 10:25 |
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