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Experimental monitoring data for prognostics and health management of MEMS

Skima, Haithem and Medjaher, Kamal and Varnier, Christophe and Zerhouni, Noureddine Experimental monitoring data for prognostics and health management of MEMS. (2017) In: CoDIT 2017, 4th InternationaConference on Control, Decision and Information Technologies, 5 April 2017 - 7 April 2017 (Barcelona, Spain).

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Official URL: http://dx.doi.org/10.1109/CoDIT.2017.8102566


This paper presents the data acquisition step of a Prognostics and Health Management (PHM) of Micro-Electro-Mechanical Systems (MEMS) application. The targeted MEMS device is an electro-thermally actuated MEMS valve. The data acquisition is performed during the accelerated lifetime tests. To perform tests, an experimental test bed is designed and built. Several test campaigns are performed where MEMS valves operated continuously and data acquired regularly. The obtained experimental results show that MEMS fabricated with the same micro-fabrication process and tested in the same conditions do not have the same behavior and the same evolution of degradation in time. Therefore, this supports the importance of applying PHM of MEMS rather than the predictive reliability.

Item Type:Conference or Workshop Item (Paper)
Additional Information:Thanks to IEEE editor. The definitive version is available at : http://ieeexplore.ieee.org/Xplore/home.jsp © 2017 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.
HAL Id:hal-01977347
Audience (conference):International conference proceedings
Uncontrolled Keywords:
Institution:French research institutions > Centre National de la Recherche Scientifique - CNRS (FRANCE)
Other partners > Ecole Nationale Supérieure de Mécanique et des Microtechniques - ENSMM (FRANCE)
Université de Toulouse > Institut National Polytechnique de Toulouse - Toulouse INP (FRANCE)
Other partners > Université de Franche-Comté (FRANCE)
Other partners > Université de Technologie de Belfort-Montbéliard - UTBM (FRANCE)
Laboratory name:
Deposited On:05 Dec 2017 14:51

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