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Combined Macro/Nanoscale Investigation of the Chemical Vapor Deposition of Fe from Fe(CO)5

Aviziotis, Ioannis G. and Duguet, Thomas and Vahlas, Constantin and Boudouvis, Andreas G. Combined Macro/Nanoscale Investigation of the Chemical Vapor Deposition of Fe from Fe(CO)5. (2017) Advanced Materials Interfaces. 1601185. ISSN 2196-7350

(Document in English)

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Official URL: http://dx.doi.org/10.1002/admi.201601185


Experiments and computations are performed to model the chemical vapor deposition of iron (Fe) from iron pentacarbonyl (Fe(CO)5). The behavior of the deposition rate is investigated as a function of temperature, in the range 130–250 °C, and pressure in the range 10–40 Torr. Furthermore, the evolution of the surface roughness is correlated with the deposition temperature. By combining previously published mechanisms for the decomposition of Fe(CO)5, a predictive 3D macroscale model of the process is built. Additionally, a nanoscale and a multiscale framework are developed for linking the evolution of the surface of the film with the operating conditions at the reactor scale. The theoretical predictions from the coupled macro/nanoscale models are in very good agreement with experimental measurements indicating poisoning of the surface from carbon monoxide and decrease of the film roughness when temperature increases.

Item Type:Article
Additional Information:Thanks to Wiley editor. The definitive version is available at http://onlinelibrary.wiley.com/ The original PDF of the article can be found at http://onlinelibrary.wiley.com/doi/10.1002/admi.201601185/abstract;jsessionid=41151D9E2F0C997C09397B8DB3B39CA8.f04t02
HAL Id:hal-01515558
Audience (journal):International peer-reviewed journal
Uncontrolled Keywords:
Institution:French research institutions > Centre National de la Recherche Scientifique - CNRS (FRANCE)
Université de Toulouse > Institut National Polytechnique de Toulouse - Toulouse INP (FRANCE)
Other partners > National Technical University of Athens - NTUA (GREECE)
Université de Toulouse > Université Toulouse III - Paul Sabatier - UT3 (FRANCE)
Laboratory name:
IFPEN - National Scholarship Foundation of Greece
Deposited On:27 Apr 2017 14:41

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