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On-chip and freestanding elastic carbon films for micro-supercapacitors

Huang, Peihua and Lethien, Christophe and Pinaud, Sébastien and Brousse, Kevin and Laloo, Raphaël and Turq, Viviane and Respaud, Marc and Demortiere, Arnaud and Daffos, Barbara and Taberna, Pierre-Louis and Chaudret, Bruno and Gogotsi, Yury and Simon, Patrice On-chip and freestanding elastic carbon films for micro-supercapacitors. (2016) Science Magazine, 351 (6274). 691-695. ISSN 0036-8075

(Document in English)

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Official URL: http://dx.doi.org/10.1126/science.aad3345


Integration of electrochemical capacitors with silicon-based electronics is a major challenge, limiting energy storage on a chip. We describe a wafer-scale process for manufacturing strongly adhering carbide-derived carbon films and interdigitated micro-supercapacitors with embedded titanium carbide current collectors, fully compatible with current microfabrication and silicon-based device technology. Capacitance of those films reaches 410 farads per cubic centimeter/200 millifarads per square centimeter in aqueous electrolyte and 170 farads per cubic centimeter/85 millifarads per square centimeter in organic electrolyte. We also demonstrate preparation of self-supported, mechanically stable, micrometer-thick porous carbon films with a Young’s modulus of 14.5 gigapascals, with the possibility of further transfer onto flexible substrates. These materials are interesting for applications in structural energy storage, tribology, and gas separation.

Item Type:Article
Additional Information:Thanks to American Association for the Advancement of Science editor. The definitive version is available at http://science.sciencemag.org/ The original PDF of the article can be found at http://science.sciencemag.org/content/351/6274/691
HAL Id:hal-01489186
Audience (journal):International peer-reviewed journal
Uncontrolled Keywords:
Institution:French research institutions > Centre National de la Recherche Scientifique - CNRS (FRANCE)
Other partners > Drexel University (USA)
Université de Toulouse > Institut National Polytechnique de Toulouse - Toulouse INP (FRANCE)
Université de Toulouse > Institut National des Sciences Appliquées de Toulouse - INSA (FRANCE)
Université de Toulouse > Université Toulouse III - Paul Sabatier - UT3 (FRANCE)
Other partners > Université de Picardie Jules Verne (FRANCE)
Other partners > Réseau de stockage électrochimique de l’énergie - Energie RS2E (FRANCE)
Other partners > Université Lille 1, Sciences et Technologies - Lille 1 (FRANCE)
Laboratory name:
Deposited On:14 Mar 2017 10:33

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