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Solution layer deposition: A technique for the growth of ultra-pure manganese oxides on silica at room temperature

Cure, Jérémy and Piettre, Kilian and Coppel, Yannick and Beche, Eric and Esvan, Jérôme and Collière, Vincent and Chaudret, Bruno and Fau, Pierre Solution layer deposition: A technique for the growth of ultra-pure manganese oxides on silica at room temperature. (2016) Angewandte Chemie International Edition, 55 (9). 3027-3030. ISSN 1433-7851

(Document in English)

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Official URL: http://dx.doi.org/10.1002/anie.201509715


With the ever increasing miniaturization in microelectronic devices, new deposition techniques are required to form high-purity metal oxide layers. Herein, we report a liquid route to specifically produce thin and conformal amorphous manganese oxide layers on silicon substrate, which can be transformed into a manganese silicate layer. The undesired insertion of carbon into the functional layers is avoided through a solution metal–organic chemistry approach named Solution Layer Deposition (SLD). The growth of a pure manganese oxide film by SLD takes place through the decoordination of ligands from a metal–organic complex in mild conditions, and coordination of the resulting metal atoms on a silica surface. The mechanism of this chemical liquid route has been elucidated by solid-state 29Si MAS NMR, XPS, SIMS, and HRTEM.

Item Type:Article
Additional Information:Thanks to John Wiley & Sons editor. The original PDF of the article can be found at http://onlinelibrary.wiley.com/doi/10.1002/anie.201509715/abstract;jsessionid=D4DF92E3797884FF338E9328DE7C300B.f02t04
HAL Id:hal-01565099
Audience (journal):International peer-reviewed journal
Uncontrolled Keywords:
Institution:French research institutions > Centre National de la Recherche Scientifique - CNRS (FRANCE)
Université de Toulouse > Institut National Polytechnique de Toulouse - Toulouse INP (FRANCE)
Université de Toulouse > Institut National des Sciences Appliquées de Toulouse - INSA (FRANCE)
Other partners > STMicroelectronics (FRANCE)
Université de Toulouse > Université Toulouse III - Paul Sabatier - UT3 (FRANCE)
Other partners > Université de Perpignan Via Domitia - UPVD (FRANCE)
Laboratory name:
Deposited On:19 Jul 2017 12:39

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