Cadoret, Loic and Reuge, Nicolas
and Pannala, Sreekanth and Syamlal, Madhava and Coufort, Carole
and Caussat, Brigitte
Silicon CVD on powders in fluidized bed: Experimental and multifluid Eulerian modelling study.
(2007)
Surface and Coatings Technology, 2 (22-). 8919-8923. ISSN 0257-8972
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(Document in English)
PDF (Author's version) - Requires a PDF viewer such as GSview, Xpdf or Adobe Acrobat Reader 930kB |
Official URL: http://dx.doi.org/10.1016/j.surfcoat.2007.04.119
Abstract
The Computational Fluid Dynamics code MFIX was used for transient simulations of silicon Fluidized Bed Chemical Vapor Deposition (FBCVD) from silane (SiH4) on coarse alumina powders. FBCVD experiments were first performed to obtain a reference database for modelling. Experimental thermal profiles existing along the bed were considered in the model. 3D simulations provide better results than 2D ones and predict silane conversion rate with a mean deviation of 9% compared to experimental values. The model can predict the temporal and spatial evolutions of local void fractions, gas and particle velocities, species gas fractions and silicon deposition rate. We aim at mid term to model FBCVD treatments of submicronic powders in a vibrated reactor since we have performed experiments proving the efficacy of the process to treat submicronic particles.
Item Type: | Article |
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Additional Information: | Thanks to Elsevier editor. The definitive version is available at http://www.sciencedirect.com The original PDF of the article can be found at Surface and Coatings Technology website : http://www.sciencedirect.com/science/journal/02578972 |
Audience (journal): | International peer-reviewed journal |
Uncontrolled Keywords: | |
Institution: | Université de Toulouse > Institut National Polytechnique de Toulouse - Toulouse INP (FRANCE) Université de Toulouse > Université Toulouse III - Paul Sabatier - UT3 (FRANCE) French research institutions > Centre National de la Recherche Scientifique - CNRS (FRANCE) |
Laboratory name: | Laboratoire de Génie Chimique - LGC (Toulouse, France) - Génie des Interfaces & Milieux Divisés (GIMD) - CVD Oak Ridge National Laboratory - ORNL (Oak Ridge, USA) National Energy Technology Laboratory (Morgantown, USA) |
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Deposited On: | 19 Nov 2008 14:06 |
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