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Thermal decomposition of tungsten hexacarbonyl: CVD of W-containing films under Pd codeposition and VUV assistance

Krisyuk, Vladislav V. and Koretskaya, Tatyana P. and Turgambaeva, Asiya E. and Trubin, Sergey V. and Korolkov, Ilya V. and Debieu, Olivier and Duguet, Thomas and Igumenov, Igor K. and Vahlas, Constantin Thermal decomposition of tungsten hexacarbonyl: CVD of W-containing films under Pd codeposition and VUV assistance. (2015) physica status solidi (c), 12 (7). 1047-1052. ISSN 1862-6351

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Official URL: http://dx.doi.org/10.1002/pssc.201510020


Experiments on chemical vapor deposition of W(CO)6- derived films on silicon substrates were carried out at total pressure of 5-10 Torr within the temperature range of 250-350 oС in Ar or H2 flow. Metallic, carbide and oxide phases composed the obtained films. Deposition in presence of hydrogen results in the increase of the metal content in the film. Sublimed palladium hexafluoracetylacetonate Pd(hfa)2 was used for Pd catalytic promotion of the deposition process. Codeposition with Pd(hfa)2 in hydrogen increases W-metal fraction and oxygen content while the Pd content is up to 10 at.%. Influence of vacuum ultraviolet (VUV) radiation from Xe excimer lamp (λ~172 nm) on the quality of the obtained films was investigated. It was found that VUV irradiation can reduce the oxygen-content in the film while W-metal fraction slightly increases. In all films, oxygen was in the form of WO3 and carbon was mainly incorporated as a graphite metastable phase. The influence of other chemical additives is discussed.

Item Type:Article
HAL Id:hal-03464736
Audience (journal):International peer-reviewed journal
Uncontrolled Keywords:
Institution:French research institutions > Centre National de la Recherche Scientifique - CNRS (FRANCE)
Université de Toulouse > Institut National Polytechnique de Toulouse - Toulouse INP (FRANCE)
Other partners > Siberian Branch of the Russian Academy of Sciences - SB RAS (RUSSIA)
Université de Toulouse > Université Toulouse III - Paul Sabatier - UT3 (FRANCE)
Laboratory name:
Deposited On:27 Aug 2015 09:32

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