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Micro-supercapacitors from carbide derived carbon (CDC) films on silicon chips

Huang, Peihua and Heon, Min and Pech, David and Brunet, Magali and Taberna, Pierre-Louis and Gogotsi, Yury and Lofland, Samuel and Hettinger, Jeffrey D. and Simon, Patrice Micro-supercapacitors from carbide derived carbon (CDC) films on silicon chips. (2013) Journal of Power Sources, 225. 240-244. ISSN 0378-7753

(Document in English)

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Official URL: http://dx.doi.org/10.1016/j.jpowsour.2012.10.020


Interdigitated on-chip micro-supercapacitors based on Carbide Derived Carbon (CDC) films were fabricated and tested. A titanium carbide (TiC) film was patterned and treated with chlorine to obtain a TiC derived carbon (TiC–CDC) film, followed by the deposition of two types of current collectors (Ti/Au and Al) using standard micro-fabrication processes. CDC based micro-supercapacitors were electrochemically characterized by cyclic voltammetry and impedance spectroscopy using a 1 M tetraethylammonium tetrafluoroborate, NEt4BF4, in propylene carbonate (PC) electrolyte. A capacitance of 0.78 mF for the device and 1.5 mF cm−2 as the specific capacitance for the footprint of the device was measured for a 2 V potential range at 100 mV s−1. A specific energy of 3.0 mJ cm−2 and a specific power of 84 mW cm−2 were calculated for the devices. These devices provide a pathway for fabricating pure carbon-based micro-supercapacitors by micro-fabrication, and can be used for powering micro-electromechanical systems (MEMS) and electronic devices.

Item Type:Article
Additional Information:Thanks to Elsevier editor. The definitive version is available at http://www.sciencedirect.com The original PDF of the article can be found at Journal of Power Sources website : www.sciencedirect.com/science/article/pii/S0378775312015753
HAL Id:hal-01159879
Audience (journal):International peer-reviewed journal
Uncontrolled Keywords:
Institution:French research institutions > Centre National de la Recherche Scientifique - CNRS (FRANCE)
Other partners > Drexel University (USA)
Université de Toulouse > Institut National Polytechnique de Toulouse - Toulouse INP (FRANCE)
Université de Toulouse > Institut National des Sciences Appliquées de Toulouse - INSA (FRANCE)
Université de Toulouse > Université Toulouse III - Paul Sabatier - UT3 (FRANCE)
Université de Toulouse > Université Toulouse - Jean Jaurès - UT2J (FRANCE)
Université de Toulouse > Université Toulouse 1 Capitole - UT1 (FRANCE)
Other partners > Réseau de stockage électrochimique de l’énergie - Energie RS2E (FRANCE)
Other partners > Rowan University (USA)
Laboratory name:
Deposited On:04 Jun 2015 07:18

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