OATAO - Open Archive Toulouse Archive Ouverte Open Access Week

Analysis of Total Dose Induced Dark Current in CMOS Image Sensors from Interface State and Trapped Charge Density Measurements

Goiffon, Vincent and Virmontois, Cédric and Magnan, Pierre and Girard, Sylvain and Paillet, Philippe Analysis of Total Dose Induced Dark Current in CMOS Image Sensors from Interface State and Trapped Charge Density Measurements. (2010) In: 2010 IEEE Nuclear and Space Radiation Effects Conference (NSREC), 19 July 2010 - 23 July 2010 (Denver, United States).

[img]
Preview
(Document in English)

PDF (Author's version) - Requires a PDF viewer such as GSview, Xpdf or Adobe Acrobat Reader
1MB
[img]
Preview
(Document in English)

PDF (Author's version) - Requires a PDF viewer such as GSview, Xpdf or Adobe Acrobat Reader
2MB

Official URL: https://doi.org/10.1109/TNS.2010.2077653

Abstract

The origin of total ionizing dose induced dark current in CMOS image sensors is investigated by comparing dark current measurements to interface state density and trapped charge density measurements. Two types of photodiode and several thick-oxide-FETs were manufactured using a 0,18 um CMOS image sensor process and exposed to 10 keV X-ray from 3 krad to 1 Mrad. It is shown that the radiation induced trapped charge extends the space charge region at the oxide interface, leading to an enhancement of interface state SRH generation current. Isochronal annealing tests show that STI interface states anneal out at temperature lower than 100°C whereas about a third of the trapped charge remains after 30 minutes at 300°C.

Item Type:Conference or Workshop Item (Paper)
Audience (conference):International conference proceedings
Uncontrolled Keywords:
Institution:French research institutions > Commissariat à l'Energie Atomique et aux énergies alternatives - CEA (FRANCE)
Université de Toulouse > Institut Supérieur de l'Aéronautique et de l'Espace - ISAE-SUPAERO (FRANCE)
Laboratory name:
Statistics:download
Deposited By: Vincent Goiffon
Deposited On:23 Sep 2014 10:22

Repository Staff Only: item control page