Study of Free-Standing Electroded PZT Thick-Films: From Materials to Microsystems

Abstract

Free-standing electroded piezoelectric PZT thick-films are straightforward fabricated thanks to the association of the low-cost screen-printing technology with the sacrificial layer method. Au/PZT/ Au bridges are directly attached onto the alumina substrate on top of it they are processed. In addition, completely released disks are also processed. A study of the behaviour of these components shows the influence of both the releasing process and the densification on the piezoelectric properties of the PZT layer. From the electromechanical measurements, electroded PZT cantilevers and disks are promising for actuator, sensor or SHM applications.