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Study of Free-Standing Electroded PZT Thick-Films: From Materials to Microsystems

Debéda, Hélène and Lakhmi, Riadh and Pommier-Budinger, Valérie and Lucat, Claude Study of Free-Standing Electroded PZT Thick-Films: From Materials to Microsystems. (2014) Key Engineering Materials, 605. 55-58. ISSN 1013-9826

(Document in English)

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Official URL: http://dx.doi.org/10.4028/www.scientific.net/KEM.605.55


Free-standing electroded piezoelectric PZT thick-films are straightforward fabricated thanks to the association of the low-cost screen-printing technology with the sacrificial layer method. Au/PZT/ Au bridges are directly attached onto the alumina substrate on top of it they are processed. In addition, completely released disks are also processed. A study of the behaviour of these components shows the influence of both the releasing process and the densification on the piezoelectric properties of the PZT layer. From the electromechanical measurements, electroded PZT cantilevers and disks are promising for actuator, sensor or SHM applications.

Item Type:Article
Additional Information:Thanks to Trans Tech Publications editor. The definitive version is available at Key Engineering Materials website : http://www.scientific.net/KEM
Audience (journal):International peer-reviewed journal
Uncontrolled Keywords:
Institution:French research institutions > Centre National de la Recherche Scientifique - CNRS (FRANCE)
Other partners > Ecole Nationale Supérieure de Chimie et de Physique de Bordeaux - ENSCPB (FRANCE)
Other partners > Ecole Nationale Supérieure d’Electronique, Informatique et Radiocommunications de Bordeaux - ENSEIRB (FRANCE)
Université de Toulouse > Institut Supérieur de l'Aéronautique et de l'Espace - ISAE-SUPAERO (FRANCE)
Other partners > Institut Polytechnique de Bordeaux - IPB (FRANCE)
Other partners > Université de Bordeaux 1 (FRANCE)
Laboratory name:
Deposited On:15 Apr 2014 08:13

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