Items where Person is "Shaharil, Nurhul"
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Thomann, Anne-Lise and Vahlas, Constantin and Alaoui, Lyacine and Samélor, Diane and Caillard, Amaël and Shaharil, Nurhul and Blanc, Romuald and Millon, Eric Conformity of aluminum thin films deposited onto micro- patterned silicon wafers by pulsed laser deposition, magnetron sputtering, and CVD. (2011) Chemical Vapor Deposition , vol. 17 (n° 10-12). pp. 366-374. ISSN 0948-1907