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CNRS - INPT Dispositif de fournitures de vapeur d'un précurseur solide à un appareil de traitement. (2007) FR2878453 (B1) .

Vahlas, Constantin and Caussat, Brigitte and Senocq, François and Gladfelter, Wayne L. and Aloui, Lyacine and Moersch, Tyler A Delivery System for Precursor Vapors Based on Sublimation in a Fluidized Bed. (2007) Chemical Vapor Deposition, vol. 1 (n° 2-3). pp. 123-129. ISSN 0948-1907

Sarantopoulos, Christos and Toro, David and Senocq, François and Vahlas, Constantin and Caussat, Brigitte and Moersch, Tyler and Gladfelter, Wayne L. Production of vapors of solid compounds by sublimation in a fluidized bed. (2005) In: Comptes Rendus du 5ème Congrès Panhellénique de Génie Chimique, Mai 2005, Thessalonique - Grèce .

Vahlas, Constantin and Caussat, Brigitte and Senocq, François and Gladfelter, Wayne L. and Sarantopoulos, Christos and Toro, David and Moersch, Tyler Fluidized bed as a solid precursor delivery system in a chemical vapor deposition reactor. (2005) In: Fifteenth European Conference on Chemical Vapor Deposition, EUROCVD-15, 4-9 september 2005, Bochum, Germany .

This list was generated on Mon Nov 24 02:47:54 2014 CET.