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Aviziotis, Ioannis G. and Cheimarios, Nikolaos and Vahlas, Constantin and Boudouvis, Andreas G. Experimental and computational investigation of chemical vapor deposition of Cu from Cu amidinate. (2013) Surface and Coatings Technology, vol. 230. pp. 273-278. ISSN 0257-8972

Kokkoris, George and Brault, Pascal and Thomann, Anne-Lise and Caillard, Amael and Samélor, Diane and Boudouvis, Andreas G. and Vahlas, Constantin Ballistic and molecular dynamics simulations of aluminum deposition in micro-trenches. (2013) Thin Solid Films, vol. 536. pp. 115-123. ISSN 0040-6090

Xenidou, Theodora C. and Prud’homme, Nathalie and Vahlas, Constantin and Markatos, Nicholas. C. and Boudouvis, Andreas. G. A comprehensive insight in the MOCVD of aluminum through interaction between reactive transport modeling and targeted growth experiments. (2009) ECS Transactions , vol. 25 (n° 8). pp. 99 -106. ISSN 1938-6737

Xenidou, Theodora C. and Prud’homme, Nathalie and Aloui, Lyacine and Vahlas, Constantin and Markatos, Nicholas. C. and Boudouvis, Andreas. G. Shape optimization of a showerhead system for the control of growth uniformity in a MOCVD reactor using CFD-based evolutionary algorithms. (2009) ECS Transactions, vol. 25 (n° 8). pp. 1053-1060. ISSN 1938-6737

Xenidou, Theodora C. and Boudouvis, Andreas. G. and Markatos, Nicholas. C. and Samélor, Diane and Senocq, François and Prud’homme, Nathalie and Vahlas, Constantin An experimental and computational analysis of a MOCVD process for the growth of Al films using DMEAA. (2007) Surface and Coatings Technology, vol. 201 (n° 22 - 23). pp. 8868-8872. ISSN 0257-8972

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