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Kokkoris, George and Brault, Pascal and Thomann, Anne-Lise and Caillard, Amael and Samélor, Diane and Boudouvis, Andreas G. and Vahlas, Constantin Ballistic and molecular dynamics simulations of aluminum deposition in micro-trenches. (2013) Thin Solid Films, vol. 536. pp. 115-123. ISSN 0040-6090

Barnabé, Antoine and Lalanne, Maëva and Presmanes, Lionel and Soon, J.M. and Tailhades, Philippe and Dumas, Carine and Grisolia, Jérémie and Arbouet, A. and Paillard, Vincent and Ben Assayag, G. and van den Boogaart, M.A.F. and Savu, V. and Brugger, Jürgen and Normand, P. Structured ZnO-based contacts deposited by non-reactive rf magnetron sputtering on ultra-thin SiO2/Si through a stencil mask. (2009) Thin Solid Films, vol. 518 (n° 4). 1044-1047 . ISSN 0040-6090

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