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A combination of capillary and dielectrophoresis-driven assembly methods for wafer scale integration of carbon-nanotube-based nanocarpets

Seichepine, Florent and Salomon, Sven and Collet, Maéva and Guillon, Samuel and Nicu, Liviu and Larrieu, Guilhem and Flahaut, Emmanuel and Vieu, Christophe A combination of capillary and dielectrophoresis-driven assembly methods for wafer scale integration of carbon-nanotube-based nanocarpets. (2012) Nanotechnology, 23 (9). 1-7. ISSN 0957-4484

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Official URL: http://dx.doi.org/10.1088/0957-4484/23/9/095303

Abstract

The wafer scale integration of carbon nanotubes (CNT) remains a challenge for electronic and electromechanical applications. We propose a novel CNT integration process relying on the combination of controlled capillary assembly and buried electrode dielectrophoresis (DEP). This process enables us to monitor the precise spatial localization of a high density of CNTs and their alignment in a pre-defined direction. Large arrays of independent and low resistivity (4.4 x 10-5 omega m) interconnections were achieved using this hybrid assembly with double-walled carbon nanotubes (DWNT). Finally, arrays of suspended individual CNT carpets are realized and we demonstrate their potential use as functional devices by monitoring their resonance frequencies (ranging between 1.7 and 10.5 MHz) using a Fabry–Perot interferometer.

Item Type:Article
Additional Information:Thanks to IOP editor. The original publication is available at http://iopscience.iop.org/0957-4484
HAL Id:hal-00832109
Audience (journal):International peer-reviewed journal
Uncontrolled Keywords:
Institution:French research institutions > Centre National de la Recherche Scientifique - CNRS (FRANCE)
Université de Toulouse > Institut National Polytechnique de Toulouse - INPT (FRANCE)
Université de Toulouse > Institut National des Sciences Appliquées de Toulouse - INSA (FRANCE)
Université de Toulouse > Institut Supérieur de l'Aéronautique et de l'Espace - ISAE-SUPAERO (FRANCE)
Université de Toulouse > Université Toulouse III - Paul Sabatier - UPS (FRANCE)
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Deposited By: cirimat webmestre
Deposited On:10 Jun 2013 08:56

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