Functionalization of, and Deposition on Complex-Shaped Surfaces: Vacuum Processes, Materials, Models, Challenges, and Methods

Thomann, Anne-Lise and Vahlas, Constantin Functionalization of, and Deposition on Complex-Shaped Surfaces: Vacuum Processes, Materials, Models, Challenges, and Methods. (2011) Chemical Vapor Deposition, vol. 17 (n° 10-12). pp. 274-278. ISSN 0948-1907

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Official URL: http://dx.doi.org/10.1002/cvde.201100101

Item Type:	Article
Audience (journal):	International peer-reviewed journal
Uncontrolled Keywords:	Aluminum - Complex surface - Conformity - Micro-patterned substrate - Plasma magnetron sputtering - Pulsed laser deposition
Institution:	French research institutions > Centre National de la Recherche Scientifique - CNRS Université de Toulouse > Institut National Polytechnique de Toulouse - INPT Université de Toulouse > Université Paul Sabatier-Toulouse III - UPS Other partners > Université d'Orléans (FRANCE)
Laboratory name:	Groupe de Recherches sur l'Energétique des Milieux Ionisés - GREMI (Orléans, France) Centre Interuniversitaire de Recherche et d'Ingénierie des Matériaux - CIRIMAT (Toulouse, France)
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Total amount of citations (from ISI Web of Science):	0
Deposited By:	Denis Faragou

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