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Effect of electric field polarization and temperature on the effective permittivity and conductivity of porous anodic aluminium oxide membranes

Tamburrano, Alessio and De Vivo, Biagio and Höijer, Magnus and Arurault, Laurent and Tucci, Vincenzo and Fontorbes, Sandra and Lamberti, Patrizia and Vilar, Virginie and Daffos, Barbara and Sarto, Maria Sabrina Effect of electric field polarization and temperature on the effective permittivity and conductivity of porous anodic aluminium oxide membranes. (2011) Microelectronic Engineering, vol. 88 (n° 11). pp. 3338-3346. ISSN 0167-9317

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Official URL: http://dx.doi.org/10.1016/j.mee.2011.08.007

Abstract

Porous insulators offer new opportunities for the controlled guest–host synthesis of nanowires for future integrated circuits characterized by low propagation delay, crosstalk and power consumption. We propose a method to estimate the effect of the electric field polarization and temperature on the electrical properties of different types of synthesized porous anodic aluminium oxide membranes. It results that the effective permittivity along the pore axis is generally 20% higher than the one in the orthogonal direction. The type of solution and the voltage level applied during anodization are the main parameters affecting the AAO templates characteristics, i.e. their porosity and chemical content. The values of permittivity of the final material, are typically in the range 2.6–3.2 for large pore diameter membranes including phosphorus element and having a low water content, and in the range 3.5–4 for the ones with smaller pores, and showing sulphur element incorporation. Moreover, the dc conductivity of the different membranes appears to be correlated to the pore density.

Item Type:Article
Additional Information:Thanks to Elsevier editor. The orinal version is available at http://www.sciencedirect.com The original PDF of the article can be found at Microelectronic Engineering website: http://www.sciencedirect.com/science/article/pii/S0167931711006484
Audience (journal):International peer-reviewed journal
Uncontrolled Keywords:
Institution:French research institutions > Centre National de la Recherche Scientifique - CNRS
Université de Toulouse > Institut National Polytechnique de Toulouse - INPT
Other partners > Università di Roma - SAPIENZA (ITALY)
Université de Toulouse > Université Paul Sabatier-Toulouse III - UPS
Other partners > Swedish Defence Research Agency - FOI (SWEDEN)
Laboratory name:
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Deposited By: Denis Faragou

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