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SPS-prepared targets for sputtering deposition of phase change films

Essi, Marc Marie-Maurice Meledge and Yot, Pascal and Chevallier, Geoffroy and Estournès, Claude and Pradel, Annie SPS-prepared targets for sputtering deposition of phase change films. (2011) Digest Journal of Nanomaterials and Biostructures, vol. 6 (n° 4). pp. 1777-1782. ISSN 1842 - 3582

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Abstract

Phase-change materials like thin films from the systems [Ge1-xPbx]Te and Ge[Te1-xSex] are of interest for data storage. For these compositions amorphous materials can not be obtained by melt quenching. However, Suitable films can be obtained using RF sputtering. Spark plasma sintering (SPS) was used to densify the powders to obtain large targets. Synthesis conditions and characterisations of the targets are reported. Amorphous nano films were obtained using the sintered targets and characterised.

Item Type:Article
Additional Information:Thanks to Forum of chalcogeniders editor. The definitive version is available at http://www.chalcogen.infim.ro/index.html The original PDF of the article can be found at Digest Journal of Nanomaterials and Biostructures website: http://www.chalcogen.infim.ro/digest.html
Audience (journal):International journal (no peer-reviewed)
Uncontrolled Keywords:
Institution:French research institutions > Centre National de la Recherche Scientifique - CNRS
Other partners > Ecole Nationale Supérieure de Chimie de Montpellier - ENSCM (FRANCE)
Université de Toulouse > Institut National Polytechnique de Toulouse - INPT
Université de Toulouse > Université Paul Sabatier-Toulouse III - UPS
Other partners > Université de Cocody-Abidjan (IVORY COAST)
Other partners > Université de Montpellier 1 (FRANCE)
Other partners > Université de Montpellier 2 (FRANCE)
Laboratory name:
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Deposited By:Denis Faragou

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