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Embedded layer of Ag nanoparticles prepared by a combined PECVD/PVD process producing SiOxCy-Ag nanocomposite thin films.

Bedel, Laurent and Cayron, Cyril and Jouve, Michel and Maury, Francis Embedded layer of Ag nanoparticles prepared by a combined PECVD/PVD process producing SiOxCy-Ag nanocomposite thin films. (2012) Nanotechnology, vol. 23 (n° 1). p. 015603(1) -015603(8). ISSN 1361-6528

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Official URL: http://dx.doi.org/10.1088/0957-4484/23/1/015603

Abstract

Structural properties of SiOxCy–Ag nanocomposite thin films prepared by a dual process PVD–PECVD in the same reactor have been investigated. The experimental results have demonstrated the influence of a PECVD process carried out at room temperature for the growth of a dielectric matrix on the size and the distribution density of Ag nanoparticles (NPs) deposited beforehand by magnetron sputtering. The plasma during the growth of the encapsulation SiOxCy layer caused a diffusion of silver from NPs through the SiOxCy matrix associated with a decrease in the average size of nanoparticles and an increase of their distribution density. Silver diffusion is blocked at a barrier interface to form a buried layer of individual Ag NPs which, for instance, can find plasmonic applications. Silver also diffuses toward the outer surface inducing antibacterial properties. In both cases initial Ag NPs act as reservoirs for multifunctional properties of advanced nanostructured films.

Item Type:Article
Additional Information:Thanks to Institute of Physics editor. The definitive version is available at http://iopscience.iop.org/ The original PDF of the article can be found at Nanotechnology website: http://iopscience.iop.org/0957-4484/23/1/015603/
Audience (journal):International peer-reviewed journal
Uncontrolled Keywords:
Institution:French research institutions > Commissariat à l'Energie Atomique et aux énergies alternatives - CEA
French research institutions > Centre National de la Recherche Scientifique - CNRS
Other partners > Institut National de l'Energie Solaire - INES (FRANCE)
Université de Toulouse > Institut National Polytechnique de Toulouse - INPT
Université de Toulouse > Université Paul Sabatier-Toulouse III - UPS
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Deposited By:Denis Faragou

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