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Multiobjective scheduling for semiconductor manufacturing plants

Baez Senties, Oscar and Azzaro-Pantel, Catherine and Pibouleau, Luc and Domenech, Serge Multiobjective scheduling for semiconductor manufacturing plants. (2010) Computers & Chemical Engineering, vol. 34 (n° 4). pp. 555-566. ISSN 0098-1354

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Official URL: http://dx.doi.org/10.1016/j.compchemeng.2010.01.010

Abstract

Scheduling of semiconductor wafer manufacturing system is identified as a complex problem, involving multiple and conflicting objectives (minimization of facility average utilization, minimization of waiting time and storage, for instance) to simultaneously satisfy. In this study, we propose an efficient approach based on an artificial neural network technique embedded into a multiobjective genetic algorithm for multi-decision scheduling problems in a semiconductor wafer fabrication environment.

Item Type:Article
Additional Information:Thanks to Elsevier editor. The definitive version is available at http://www.sciencedirect.com The original PDF of the article can be found at Computers & Chemical Engineering website : http://www.sciencedirect.com/science/journal/00981354
Audience (journal):International peer-reviewed journal
Uncontrolled Keywords:
Institution:French research institutions > Centre National de la Recherche Scientifique - CNRS
Université de Toulouse > Institut National Polytechnique de Toulouse - INPT
Université de Toulouse > Université Paul Sabatier-Toulouse III - UPS
Laboratory name:
Laboratoire de Génie Chimique - LGC (Toulouse, France) - Procédés Systèmes Industriels (PSI) - Conception Optimisation Ordonnancement des Procédés (COOP)
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Deposited By: Vincent GERBAUD

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