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The description of friction of silicon MEMS with surface roughness: virtues and limitations of a stochastic Prandtl–Tomlinson model and the simulation of vibration-induced friction reduction

Van Spengen, W. Merlijn and Turq, Viviane and Frenken, Joost W. M. The description of friction of silicon MEMS with surface roughness: virtues and limitations of a stochastic Prandtl–Tomlinson model and the simulation of vibration-induced friction reduction. (2010) Beilstein Journal of Nanotechnology (n° 1). pp. 163-171. ISSN 2190-4286

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Official URL: http://dx.doi.org/10.3762/bjnano.1.20

Abstract

We have replaced the periodic Prandtl–Tomlinson model with an atomic-scale friction model with a random roughness term describing the surface roughness of micro-electromechanical systems (MEMS) devices with sliding surfaces. This new model is shown to exhibit the same features as previously reported experimental MEMS friction loop data. The correlation function of the surface roughness is shown to play a critical role in the modelling. It is experimentally obtained by probing the sidewall surfaces of a MEMS device flipped upright in on-chip hinges with an AFM (atomic force microscope). The addition of a modulation term to the model allows us to also simulate the effect of vibration-induced friction reduction (normal-force modulation), as a function of both vibration amplitude and frequency. The results obtained agree very well with measurement data reported previously.

Item Type:Article
Additional Information:Thanks to Beilstein Institut editor. The definitive version is available at http://www.beilstein-institut.de The original PDF of the article can be found at Beilstein Journal of Nanotechnology website : http://www.beilstein-journals.org/bjnano/single/articleFullText.htm?publicId=2190-4286-1-20
Audience (journal):International peer-reviewed journal
Uncontrolled Keywords:
Institution:French research institutions > Centre National de la Recherche Scientifique - CNRS
Université de Toulouse > Institut National Polytechnique de Toulouse - INPT
Université de Toulouse > Université Paul Sabatier-Toulouse III - UPS
Other partners > Delft University of Technology - TU Delft (NETHERLANDS)
Other partners > Falco Systems (NETHERLANDS)
Other partners > Universiteit Leiden (NETHERLANDS)
Laboratory name:
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Deposited By:Leila Abdelouhab

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