Electrical conductivity of parylene F at high temperature

Abstract

The electrical conductivity of both as-deposited and annealed poly(α,α,α′,α′-tetrafluoro-p-xylylene) (PA-F) films has been investigated up to 400°C. The static conductivity (σ DC) values of PA-F measured between 200°C and 340°C appear to be ∼2.5 orders of magnitude lower for annealed films than for as-deposited ones. This change is attributed to a strong increase in the crystallinity of the material occurring above 340°C. After annealing at 400°C in N2, the σ DC value measured at 300°C, for instance, decreased from 3.8 × 10−12 Ω−1 cm−1 to 7.5 × 10−15 Ω−1 cm−1. Physical interpretations of such an improvement are offered.