Reuge, Nicolas and Dexpert-Ghys, Jeannette and Caussat, Brigitte Fluidized-Bed MOCVD of Bi2O3 Thin Films from Bismuth Triphenyl under Atmospheric Pressure. (2010) Chemical Vapor Deposition, vol. 1 (n° 4-6). pp. 123-126. ISSN 0948-1907
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Official URL: http://dx.doi.org/10.1002/cvde.200904280
Abstract
Bismuth oxide thin films are of great interest due to their significant band gap, high refractive index, and dielectric permittivity, as well as marked photoconductivity and photoluminescence.[1] These properties make Bi2O3 films well suited for many applications such as microelectronics,[2] sensor technology,[3] optical coatings,[4] and ceramic glass manufacturing.[5] In this work, we report the synthesis of Bi2O3 films on alumina particles using fluidized bed (FB) CVD under atmospheric pressure. Bismuth triphenyl (Bi(Ph)3) was used as a metal-organic (MO) CVD precursor.
| Item Type: | Article |
|---|---|
| Additional Information: | The definitive version is available at http://onlinelibrary.wiley.com/doi/10.1002/cvde.200904280/abstract |
| Audience (journal): | International peer-reviewed journal |
| Uncontrolled Keywords: | |
| Institution: | French research institutions > Centre National de la Recherche Scientifique - CNRS Université de Toulouse > Ecole des Mines d'Albi-Carmaux - EMAC Université de Toulouse > Institut National Polytechnique de Toulouse - INPT Université de Toulouse > Institut National des Sciences Appliquées de Toulouse - INSA Université de Toulouse > Université Paul Sabatier-Toulouse III - UPS |
| Laboratory name: | Laboratoire de Génie Chimique - LGC (Toulouse, France) - Génie des Interfaces & Milieux Divisés (GIMD) - CVD Centre d'Elaboration de Matériaux et d'Etudes Structurales - CEMES (Toulouse, France) |
| Statistics: | download |
| Total amount of citations (from ISI Web of Science): | 0 |
| Deposited By: | Brigitte CAUSSAT-BONNANS |
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