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Nanocrystalline chromium-based coatings deposited by DLI-MOCVD under atmospheric pressure from Cr(CO)6

Douard, Aurélia and Maury, Francis Nanocrystalline chromium-based coatings deposited by DLI-MOCVD under atmospheric pressure from Cr(CO)6. (2006) Surface and Coatings Technology, vol. 2 (n° 22-). pp. 6267-6271. ISSN 0257-8972

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Official URL: http://dx.doi.org/10.1016/j.surfcoat.2005.11.043

Abstract

Nanocrystalline original Cr-based coatings were grown under atmospheric pressure by Direct Liquid Injection Metal Organic Chemical Vapor Deposition (DLI-MOCVD). The thin films were grown below 450 °C in a cold wall CVD reactor from solutions of Cr(CO)6 in toluene or THF injected and flash vaporized with or without NH3 addition prior to the deposition zone. Original nanocrystalline chromium oxycarbide and oxy-carbonitride phases were deposited on stainless steel substrates. The influence of injection parameters and conventional CVD conditions have been investigated on the main chemical, physical and structural characteristics of the coatings, as deduced from XRD, SEM, and EPMA analyses.

Item Type:Article
Additional Information:http://www.sciencedirect.com/science/journal/02578972
Audience (journal):International peer-reviewed journal
Uncontrolled Keywords:
Institution: Université de Toulouse > Institut National Polytechnique de Toulouse - INPT
Université de Toulouse > Université Paul Sabatier-Toulouse III - UPS
French research institutions > Centre National de la Recherche Scientifique - CNRS
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Deposited By: Thomas Bonnecarere

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