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A comprehensive insight in the MOCVD of aluminum through interaction between reactive transport modeling and targeted growth experiments

Xenidou, Theodora C. and Prud’homme, Nathalie and Vahlas, Constantin and Markatos, Nicholas. C. and Boudouvis, Andreas. G. A comprehensive insight in the MOCVD of aluminum through interaction between reactive transport modeling and targeted growth experiments. (2009) ECS Transactions , vol. 25 (n° 8). pp. 99 -106. ISSN 1938-6737

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Official URL: http://dx.doi.org/10.1149/1.3207580

Abstract

Growth experiments and reactive transport modeling were combined to formulate a comprehensive predictive model for aluminum growth from dimethylethylamine alane. The growth-rate profile was experimentally investigated as a function of substrate temperature. The reactive transport model, built under the computational fluid dynamics software PHOENICS, was used to reproduce the experimental measurements and to contribute to the understanding of the aluminum growth process, under sub-atmospheric pressure conditions. The growth mechanism of aluminum films was based on well established in literature reaction order and activation energy of homogeneous and heterogeneous chemical reactions. The reactive transport model was used further to investigate the effect of some key operating parameters on the process output. Simulation results are suggestive of modifications in the operating parameters that could enhance the growth rate and the spatial uniformity of the film thickness.

Item Type:Article
Additional Information:Thanks to The Electrochemical Society editor. The definitive version is available at http://www.electrochem.org/ The original PDF of the article can be found at ECS Transactions website: http://www.ecsdl.org/getabs/servlet/GetabsServlet?prog=normal&id=ECSTF8000025000008000099000001&idtype=cvips&gifs=yes&ref=no
Audience (journal):International peer-reviewed journal
Uncontrolled Keywords:
Institution:French research institutions > Centre National de la Recherche Scientifique - CNRS
Université de Toulouse > Institut National Polytechnique de Toulouse - INPT
Other partners > National Technical University of Athens - NTUA (GREECE)
Université de Toulouse > Université Paul Sabatier-Toulouse III - UPS
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Deposited By: Nihad Lahdifi
Deposited On:27 Jan 2012 09:21

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