OATAO - Open Archive Toulouse Archive Ouverte Open Access Week

Shape optimization of a showerhead system for the control of growth uniformity in a MOCVD reactor using CFD-based evolutionary algorithms

Xenidou, Theodora C. and Prud’homme, Nathalie and Aloui, Lyacine and Vahlas, Constantin and Markatos, Nicholas. C. and Boudouvis, Andreas. G. Shape optimization of a showerhead system for the control of growth uniformity in a MOCVD reactor using CFD-based evolutionary algorithms. (2009) ECS Transactions, vol. 25 (n° 8). pp. 1053-1060. ISSN 1938-6737

[img] (Document in English)

PDF (Author's version) - Requires a PDF viewer such as GSview, Xpdf or Adobe Acrobat Reader
63kB

Official URL: http://dx.doi.org/10.1149/1.3207705

Abstract

A steady state, laminar flow coupled with heat transfer, gas-phase and surface chemistry, is numerically solved for the optimal design of a showerhead gas delivery system in an axis-symmetrical MOCVD reactor. The design method involves an evolutionary algorithm based on CFD simulations. A finite-volume CFD code for aluminum growth provides the numerical predictions of the growth rate and its spatial variation over the substrate. A multilevel evolutionary algorithm is used to continuously adjust the shape of the shower plate so as to minimize the spatial variation of the growth rate. A 5-variable parameterization of the shower plate is investigated and a near-optimal solution is proposed and compared to the original configuration of the shower plate.

Item Type:Article
Additional Information:This article is available on procedings about : 216th ECS Meeting, October 4 - October 9, 2009 , Vienna, Austria. Thanks to The Electrochemical Society editor. The definitive version is available at www.electrochem.org/ The original PDF of the article can be found at ECS Transactions website : http://scitation.aip.org/getabs/servlet/GetabsServlet?prog=normal&id=ECSTF8000025000008001053000001&idtype=cvips&gifs=yes&ref=no
Audience (journal):International peer-reviewed journal
Uncontrolled Keywords:
Institution:French research institutions > Centre National de la Recherche Scientifique - CNRS
Université de Toulouse > Institut National Polytechnique de Toulouse - INPT
Other partners > National Technical University of Athens - NTUA (GREECE)
Université de Toulouse > Université Paul Sabatier-Toulouse III - UPS
Laboratory name:
Statistics:download
Deposited By: Nihad Lahdifi
Deposited On:13 Jan 2011 15:00

Repository Staff Only: item control page