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Vapor phase surface functionalization under ultra violet activation of parylene thin films grown by chemical vapor deposition

Santucci, Virginie and Maury, Francis and Senocq, François Vapor phase surface functionalization under ultra violet activation of parylene thin films grown by chemical vapor deposition. (2010) Thin Solid Films, vol. 518 (n° 6). 1675-1681 . ISSN 040-6090

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Official URL: http://dx.doi.org/10.1016/j.tsf.2009.11.064

Abstract

Various reactive gas phase treatments have been investigated as surface functionalization dry processes with the goal to improve the wettability of parylene C films, keeping good optical properties in the visible range. The films were grown on different substrates by chemical vapor deposition with thicknesses ranging from 300 to 1630 nm. The polymer surface was treated under ultra violet (UV) irradiation at 254 nm in reactive atmospheres including He, H2O, H2O2, O2 and ambient air. The UV/O2 treatment is the most efficient since the water contact angle decreases from 100° to 6° while the transmittance is maintained at 90% in the visible wavelengths. Furthermore it exhibits long life stability. The functionalization mechanism is discussed in relation with previous reports.

Item Type:Article
Additional Information:Thanks to Elsevier editor. The definitive version is available at http://www.sciencedirect.com The original PDF of the article can be found at Thin Solid Films website : http://www.sciencedirect.com/science/journal/00406090
Audience (journal):International peer-reviewed journal
Uncontrolled Keywords:
Institution: Université de Toulouse > Institut National Polytechnique de Toulouse - INPT
Université de Toulouse > Université Paul Sabatier-Toulouse III - UPS
French research institutions > Centre National de la Recherche Scientifique - CNRS
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Deposited By:Nihad Lahdifi

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