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Chromium-based coatings by atmospheric chemical vapor deposition at low temperature from Cr(CO)6

Douard, Aurélia and Maury, Francis Chromium-based coatings by atmospheric chemical vapor deposition at low temperature from Cr(CO)6. (2005) Surface and Coatings Technology, vol. 2 (n° 5-6). 1407 -1412. ISSN 0257-8972

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Official URL: http://dx.doi.org/10.1016/j.surfcoat.2005.08.093

Abstract

Cr-based coatings were grown under atmospheric pressure in different gaseous atmospheres (N2,H2, NH3) from the thermal decomposition of Cr(CO)6 at 300 °C in a cold-wall CVD reactor. Cr(CO)6 is a good candidate as precursor because of its low cost and its high volatility, which permits high flow rates. Original chromium oxycarbide and oxynitride coatings were deposited on steel. These phases were previously obtained by plasma-assisted CVD and low-pressure CVD, i.e., under nonequilibrium conditions. In the present work, the low deposition temperature likely accounts for their formation. We have investigated correlations between the growth conditions and their main chemical, structural and physical features. Preliminary results on the mechanical behavior of these Cr-based coatings are also reported.

Item Type:Article
Additional Information:http://www.sciencedirect.com/science/journal/02578972
Audience (journal):International peer-reviewed journal
Uncontrolled Keywords:
Institution: Université de Toulouse > Institut National Polytechnique de Toulouse - INPT
Université de Toulouse > Université Paul Sabatier-Toulouse III - UPS
French research institutions > Centre National de la Recherche Scientifique - CNRS
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Deposited By:Gestionnaire Raphaele Rigola

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